Method for fabricating a precious-metal electrode

摘要

A method for fabricating a precious-metal electrode for a storage capacitor includes providing a substrate, applying a catalytically inactive insulation and a catalytically active connection region to the substrate. The catalytically active connection region can be a precious metal material such as a precious metal or an oxide of a precious metal. The catalytically active connection region and the catalytically inactive insulation region are produced, for example, by patterning the connection region or by planarizing the connection region and the insulation region. The next step is depositing selectively the precious metal material on the catalytically active connection region by passing an organometallic compound of a precious metal to the substrate at a temperature from 0° to 120° C. Alternatively, the precious metal can be formed by depositing selectively the precious metal material on the catalytically active connection region by passing Pt(PF3)4 to the substrate at a temperature from 80° to 150° C.