发明名称 Semiconductor device, method of manufacturing the same and method of designing the same
摘要 A semiconductor device comprises a plurality of superposed layers including a predetermined layer provided, in a peripheral part of a chip, with a dummy pattern of a material that is the same as that forming a wiring pattern formed in the same predetermined layer, the dummy pattern being formed on an inner side of a dicing region. The ratio of an area of the dummy pattern in a planar region defined by the inner edge of the dummy pattern, the outer edge of the dicing region and two optional, parallel lines to that of the planar region is 50% or above.
申请公布号 US2002089036(A1) 申请公布日期 2002.07.11
申请号 US20010915566 申请日期 2001.07.27
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 SHINKAWATA HIROKI
分类号 H01L23/52;H01L21/3105;H01L21/3205;H01L21/822;H01L23/528;H01L27/02;H01L27/04;(IPC1-7):H01L29/00 主分类号 H01L23/52
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