| 摘要 |
PROBLEM TO BE SOLVED: To generate a high resolution clock even by means of a delay circuit with lower resolution precision. SOLUTION: This IC inspection device is provided with a vibration source 130 with a fixed cycle clock pulse, a clock generating means 101 generating a first clock at a desired cycle according to the clock pulse, a counter circuits 102-106 each counting the clock pulse and generating a counting clock at a cycle equal to an integral multiple of the vibration source cycle, delay circuits 108-112 delaying the respective counting clocks and generating a second clock, reference clock generating means 137 and 129 having highly precise time resolution and generating a reference clock on the basis of the clock pulse, a distribution means 128 distributing the reference clock to an optional delay circuit, selective input means 113-117 selectively inputting the counting clock and the reference clock to the delay circuit, phase detecting means 125-127 detecting conformity of a phase between a pair of delay circuit outputs (a second clock, a reference clock), and a data retaining means 119 varying the data given to the second clock side delay circuit and retaining the data given to the second clock side delay circuit in which conformity of the phase is detected. |
