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发明名称
METHOD AND APPARATUS FOR ETCHING AND DEPOSITION USING MICRO-PLASMAS
摘要
申请公布号
EP1221174(A1)
申请公布日期
2002.07.10
申请号
EP20000973456
申请日期
2000.10.11
申请人
WISCONSIN ALUMNI RESEARCH FOUNDATION
发明人
GIANCHANDANI, YOGESH, B.;WILSON, CHESTER, G.
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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