HEAT TREATMENT APPARATUS OF SHEET TYPE HEATED BODY AND HEAT TREATMENT METHOD OF THE SAME

摘要

PURPOSE: A heat treatment apparatus of a sheet type heated body and a heat treatment method of the same are provided which not only obtain high energy efficiency and heat treatment rate when heat treating the ceramic material by forming a ceramic material into a sheet type but also improve heat treatment properties of the heated body. CONSTITUTION: The heat treatment apparatus of a sheet type heated body(115) comprises one or more unit heat treatment systems(100) on which the heated body(115) is mounted, and on which a heating element(111) that is radiated by absorbing microwaves and heat treats the heated body(115) by conducting heat generated to the heated body(115) is put; a transfer part(120) for transferring the heated body(115) to inner and outer sides of the unit heat treatment systems(100); a microwave cutoff part(160) which is installed at the transfer part(120) to prevent leakage of microwaves; a cooling gas supply part(170) for controlling temperature inside the unit heat treatment systems(100) heated by the heating element(111) by infusing cooling gas into the unit heat treatment systems(100); a reactant treatment part(180) for treating reactants generated by heating of the heated body(115); and a main control part(190) for controlling the unit heat treatment systems(100), transfer part(120), cooling gas supply part(170) and reactant treatment part(180) by sensing temperature of the heated body(115), heating element(111) and the inside of the unit heat treatment systems(100).