| 摘要 |
PROBLEM TO BE SOLVED: To conduct temperature control with high accuracy, and raise controllability. SOLUTION: A freezer 2, a heater 3, the first temperature sensor 4, a pump 5, a buffer tank 6, and the second temperature sensor 7 are arranged in this order at prescribed positions in a refrigerant passage 1, and also this chiller has a temperature controller 8 which outputs control signals which should be supplied to the freezer 2 and the heater 3, accepting the input of the output of the first temperature sensor 4 and the output of the second temperature sensor 7.
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