发明名称 FIXING DEVICE FOR PROBE ELEMENT
摘要 PROBLEM TO BE SOLVED: To easily and accurately fix a minute probe element to wiring. SOLUTION: This fixing device includes a gripping means gripping the probe element to be fixed, a stage receiving a probe unit, a driving means three- dimensionally and relatively moving the probe element gripped by the gripping means and the probe unit received by the stage, and a heating means heating a conductive adhesive, the probe element or the wiring and fixing the probe element to the wiring.
申请公布号 JP2002196015(A) 申请公布日期 2002.07.10
申请号 JP20000392476 申请日期 2000.12.25
申请人 MICRONICS JAPAN CO LTD 发明人 HASEGAWA YOSHIE
分类号 G01R1/073;G01R1/06;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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