| 摘要 |
PROBLEM TO BE SOLVED: To enable safe maintenance of a chamber, in a state in which a lower chamber member is lowered at a maintaining time of the chamber by opening or closing the chamber through vertical moving of the chamber member by fixing the chamber member. SOLUTION: The chamber device, having a vertically opening/closing chamber, comprises an upper chamber 2 fixing structure and a lower chamber 3 vertically movable structure. The chamber is opened or closed by vertically moving the chamber 3. At the chamber opening time, the chamber 3 is lowered, and the chamber 3 can be drawn out toward forward direction. Thus, assembling, regulating, maintenance in the chamber can be facilitated.
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