LIQUID SEALED SYSTEM ACTIVE VIBRO-ISOLATING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide active vibro-isolating equipment of new structure capable of assembling a build in type actuator to vibro-isolating equipment in a fine workability. SOLUTION: Either the driving shaft 58 firmly installed on the vibrating plate 93 or the output shaft 178 of the actuator 98, the joint part 190 is provided so that the joint groove 182 extends in the hoop direction in the other one of the driving shaft 58 or the output shaft 178, besides the joint pin 180 that protrudes outward in the direction orthogonal to the shaft is firmly installed. And the driving shaft 58 and the output shaft 178 are firmly connected mutually by jointing the driving shaft 58 and the output shaft 178 which are rotated relatively surrounding the center shaft and joint the joint pin 180 with the joint groove 182.