| 摘要 |
PROBLEM TO BE SOLVED: To cancel a shift between a displacement amount of a cantilever generated in two-dimensional scan and a positional displacement amount of a spot of a laser beam, in a scanning type probe microscope using a probe scanning system arranged with a laser beam source between an XY piezo scanner for conducting the two dimensional scanning and a Z piezo scanner for conducting height-directional control to conduct the scanning. SOLUTION: A positional shift correcting electrode 20 is formed in a piezoelectric element of the Z scanner 5 in addition to a Z-directionally extending electrode. An X-directional positional shift correcting electrode and a Y-directional positional shift correcting electrode are provided in the positional shift correcting electrode 20. When scanned by the XY scanner 4, a proper voltage is impressed to the positional shift correcting electrode 20 of the Z scanner 5, and the cantilever 1 is displaced X-directionally and/or Y-directionally to cancel the shift between the displacement amount of the cantilever 1 and the positional displacement amount of the spot of the laser beam.
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