| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting the pressure highly accurately with a simple formation. SOLUTION: In this sensor, an upper glass 2 having an opening part 7 formed on the center, silicone 3 having a diaphragm 3b formed on the center, and a lower glass 4 having an opening part 9 formed on the center are laminated. A resonance driving circuit 5 is installed between the upper glass 2 and the diaphragm 3b, and a voltage having a prescribed frequency is applied to the diaphragm 3b, to thereby vibrate the diaphragm 3b. An amplitude measuring circuit 6 is installed between the lower glass 4 and the diaphragm 3b, to measure the amplitude of vibration generated on the diaphragm 3b. The pressure on the pressure side to be measured is acquired based on the measured amplitude in a pressure detection part 13.
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