| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature sensor having excellent responsiveness, its manufacturing method and a manufacture control method, and especially to provide a high- temperature sensor or the like suitable for use at the high temperature for exhaust gas temperature measuring use of a combustion instrument or an internal combustion engine. SOLUTION: In this temperature sensor equipped with a thermosensitive body and a ceramic body for forming a hollow part enclosing airtightly the thermosensitive body, the ceramic body has irregularities formed on the surface and voids formed inside or the like, and the thermosensitive body is arranged on the thermosensitive face side of a ceramic part forming the hollow part. The hollow part is formed on a position biased to the thermosensitive face side from the center of the temperature sensor. The ceramic body is constituted from a thermosensitive face side ceramic layer equipped with the thermosensitive body, a spacer ceramic layer having an opening part, and a base material ceramic layer working as the base material. The irregularities are formed on the surface of the ceramic body, and through holes or the like are formed together in the ceramic body, to thereby improve furthermore the response of the temperature sensor.
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