| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater, with which the heating surface temperature of a ceramic substrate can be uniformized, in which no short circuiting occurs between the circuit ends of adjacent resistance heating elements, the end and the middle part of the circuit, or other different components, and of which the connection reliability can be maintained over a long period of usage. SOLUTION: The resistance heating element is formed on the surface of the ceramic substrate, the resistance heating element comprising one or a plurality of circuits having an outer terminal on its end. Among the pairs of the different outer terminals, the outer terminal and the circuit, and the different circuits, at least one pair consists of the components adjacent to each other with an insulation material interposed in-between.
|
