| 摘要 |
An optical alignment apparatus including a beam splitter (2) for diverging a primary laser beam (4) emitted by a radiation source (5) into a plurality of divergent beam portions (3a, 3b, 3c, 3d, 3e), and elements for minimizing the angle error of the divergent beam portions (3a, 3b, 3c, 3d, 3e) and including a collimator (6) located between the radiation source (5) and the beam splitter (2), and a spacially oscillatingly adjustable, transparent, plane-parallel plate (7) arranged in a path of the primary laser beam (4).
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