发明名称 Tandem plasma mass filter
摘要 <p>The present invention pertains generally to devices and apparatus which are capable of separating charged particles and plasma according to the respective masses and in particular provides a plasma mass filter for separating low-mass particles from high-mass particles which comprises a cylindrical shaped wall. A plasma mass filter (10) for separating low-mass particles from high-mass particles which comprises a cylindrical shaped wall (12) surrounding a chamber (14), said chamber defining a longitudinal axis, said cylindrical shaped wall (12) having a first end and a second end and being formed with at least on chamber inlet (30) positioned substantially midway therebetween, means for generating a magnetic field in said chamber, said magnetic field being aligned substantially parallel to said longitudinal axis, means for generating an electric field substantially perpendicular to said magnetic field to create crossed magnetic and electric fields, said electric field having a positive potential on said longitudinal axis and a substantially zero potential on said wall, means for injecting (33) a vaporised material through said chamber inlet (30) and into said chamber, and means for ionising (38) said vaporised material in said chamber to create a multi-species plasma in said chamber to interact with said crossed magnetic and electric fields for ejecting said high-mass particles into said wall and for confining said low-mass particles in said chamber during transit therethrough to separate said low-mass particles from said high-mass particles. &lt;IMAGE&gt;</p>
申请公布号 EP1220293(A2) 申请公布日期 2002.07.03
申请号 EP20010201375 申请日期 2001.04.13
申请人 ARCHIMEDES TECHNOLOGY GROUP, INC. 发明人 OHKAWA, TIHIRO
分类号 H05H1/00;B01D59/48;H01J49/26;H01J49/28;H01J49/30;H05H1/46;(IPC1-7):H01J49/48 主分类号 H05H1/00
代理机构 代理人
主权项
地址