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发明名称
MULTI-BEAM SCANNER INCLUDING A DOVE PRISM ARRAY
摘要
申请公布号
EP1218791(A2)
申请公布日期
2002.07.03
申请号
EP20000919435
申请日期
2000.03.17
申请人
ETEC SYSTEMS, INC.
发明人
THOMAS, TIMOTHY, N.;ALLEN, PAUL, C.
分类号
G02B26/10;G02B26/12;G02B27/64;G03F7/20;H01L21/027;(IPC1-7):G02B26/12;G02B5/04;G02B7/18;H04N1/113
主分类号
G02B26/10
代理机构
代理人
主权项
地址
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