| 发明名称 |
Method for the production of a porous layer |
| 摘要 |
An interference filter having a layer with an area consisting of a porous material extending from the surface of the layer to the interior, the dimensions of the porous layer area in a direction normal to the layer surface have different values to provide for varying reflection or, respectively, transmission characteristics.
|
| 申请公布号 |
US6413408(B1) |
申请公布日期 |
2002.07.02 |
| 申请号 |
US19990336546 |
申请日期 |
1999.06.19 |
| 申请人 |
FORSCHUNGSZENTRUM JUELIEH GMBH |
发明人 |
BERGER MICHAEL;KRUEGER MICHAEL;THOENISSEN MARKUS;ARENS-FISCHER RUEDIGER;LUETH HANS;LANG WALTER;THEISS WOLFGANG;HILBRICH STEFAN |
| 分类号 |
C25F3/12;G02B5/20;G02B5/28;H01L21/306;(IPC1-7):B23H3/00;B23H5/00;C25F3/00;C25F7/00;H05K3/07 |
主分类号 |
C25F3/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
