发明名称 Method of forming a shared contact in a semiconductor device including MOSFETS
摘要 An objective of this invention is to provide a process for manufacturing a shared contact without protrusion toward an adjacent gate electrode and an improved shared contact. This invention allows a shared contact without protrusion from the gate electrode to be prepared by removing a gate electrode which is in contact with a dopant diffusion layer but is not used as a transistor element and forming a shared contact in the area. As a result, a cell size is larger in an SRAM according to this invention than in that according to the prior art.
申请公布号 US6413811(B1) 申请公布日期 2002.07.02
申请号 US20000609926 申请日期 2000.07.05
申请人 NEC CORPORATION 发明人 MASUOKA SADAAKI
分类号 H01L21/8234;H01L21/8244;H01L27/11;(IPC1-7):H01L21/824;H01L21/336;H01L21/320;H01L21/476 主分类号 H01L21/8234
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