发明名称 |
Miniature turbomolecular pump |
摘要 |
The present invention provides a very compact, lightweight, turbomolecular pump for evacuating a chamber at volumetric flowrates of less than 10 liters per second. In one embodiment a turbomolecular pump is provided having a bladed rotor disposed within a housing, and mounted for rotation at one end on a passive magnetic main bearing and at the other end on a ball bearing. The pump is configured such that the magnetic bearing carries a majority of the rotor unbalance load. The rotor may be beneficially tapered from a larger diameter at the high vacuum end to a smaller diameter at the low vacuum end. The invention also provides a method of machining the blades of the rotor from a rotor blank using a single point tool in a two-step numerical control lathe operation. In another method of the invention, the rotor blades are individually cut using a high speed circular slitting saw by plunging the saw radially into the rotor blank.
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申请公布号 |
US6412173(B1) |
申请公布日期 |
2002.07.02 |
申请号 |
US20000626299 |
申请日期 |
2000.07.25 |
申请人 |
PHOENIX ANALYSIS AND DESIGN TECHNOLOGIES, INC. |
发明人 |
JOHNSON MARK C.;MCNAMEE MICHAEL R.;ADDINK JASON L. |
分类号 |
B23C3/32;F04D19/04;(IPC1-7):B23P15/00 |
主分类号 |
B23C3/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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