Precision positioner for optical elements

摘要

A precision positioner has a moveable stage coupled to an optical element, a frame, a first arm having at a first end a first coupling to the stage, and having a second end adapted to receive a first encoded translator referenced to the frame. The precision positioner also has a second arm having at a first end a second coupling to the stage and having a second end adapted to receive a second encoded translator referenced to the frame. In a first precision positioner, both the first and second couplings to the stage are one-axis rotary flexures. In a second precision positioner, the first coupling to the stage is a one-axis rotary flexure and the second coupling to the stage is a rigid non-flexure.