发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a capacitor capable of assuring a prescribed electrostatic capacity and simultaneously reducing in size, and a method for manufacturing the same. SOLUTION: The semiconductor device comprises a capacitor lower electrode 3a having an upper surface and a metal film, a dielectric film 4a disposed on the upper surface of the electrode 3a and having a thickness smaller than that of the electrode 3a, and a capacitor upper electrode 6a disposed on the film 4a and having a width narrower than that of the electrode 3a and a metal film.
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申请公布号 |
JP2002184953(A) |
申请公布日期 |
2002.06.28 |
申请号 |
JP20000382285 |
申请日期 |
2000.12.15 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
HORI KAZUNOBU;MATSUNUMA KENJI;SHIOZAWA KENICHIRO;AKAZAWA MORIAKI |
分类号 |
H01L21/3205;H01L21/02;H01L21/768;H01L21/822;H01L23/52;H01L27/04;H01L27/08;(IPC1-7):H01L27/04;H01L21/320 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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