LIGHTING FIXTURE, UNIFORM LIGHTING FIXTURE, PROJECTION DEVICE USING THESE, ALIGNER AND LASER PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical system and an optical device using this for uniformly irradiating light emitted from a plurality of light sources realizing a compact constitution to radiate at the minimum angle of incidence. SOLUTION: In a laser array 11, laser emission parts 11a, 11b, 11c... are straightly arranged at an equal pitch and an outgoing light B1 is made a parallel luminous flux (luminous flux B2) regarding at least one direction by a cylindrical lens array 12. For example, in one embodiment of Fig. 1, the outgoing light B1 is made parallel in a direction parallel to the paper surface. The outgoing luminous flux B3 is converged to an incident side edge surface 14a of a kaleidoscope 14. A distribution of an in-plane strength of the luminous flux is uniformized in the kaleidoscope 14 and is radiated to a part 16 to be irradiated by a relay lens 15.