ABRASIVE MATERIAL FOR HARD AND BRITTLE MATERIAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a lithium tantalate substrate abrasive material of a high polishing rate. SOLUTION: A abrasive material composition comprises (a) 1 to 10 wt.%γ-alumina of BET specific surface 40 to 160 m2/g and 0.5μm in average grain diameter, (b) 10 to 30 wt.% colloidal silica or fumed silica 10 to 100 nm in average grain diameter, (c) 1 to 25 wt.% polyethylene glycol of molecular weight 100 to 400, (d) 0.5 to 5 wt.% dispersing agent, and (e) 30 to 87 wt.% water, is of pH 8.5 to 12.5, and serves as a hard and fragile material substrate abrasive material.