| 摘要 |
PROBLEM TO BE SOLVED: To improve the quality and reliability of a thin-film transistor(TFT). SOLUTION: A method of reducing contamination in polycrystalline silicon regions on a display substrate comprises a step (a) of depositing a base coating on the display substrate, a step (b) of annealing the base coating, having an upper surface, a step (c) of decontaminating the upper surface of the base coating, a step (d) of depositing amorphous silicon on the decontaminated base coating and step (e) of crystallizing the amorphous silicon, to form polycrystalline regions.
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