| 发明名称 |
PARAMETRIC PROFILING USING OPTICAL SPECTROSCOPIC SYSTEMS |
| 摘要 |
The invention relates in general to systems dor finding profiles of topographical features of small dimensions, such as those of a silicon substrate (12), and in particular to such systems using optical spectrometer (60).
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| 申请公布号 |
WO0250501(A1) |
申请公布日期 |
2002.06.27 |
| 申请号 |
WO2001US49001 |
申请日期 |
2001.12.18 |
| 申请人 |
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发明人 |
SHCHEGROV, ANDREI, V.;FABRIKANT, ANATOLY;NIKOONAHAD, MEHRDAD |
| 分类号 |
G01J3/447;G01J4/04;G01N21/21;(IPC1-7):G01J4/00;G01N21/00 |
主分类号 |
G01J3/447 |
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