发明名称 Fremgangsmåde til plasmabehandling og/eller plasmabelægning af emner under kontinuerligt atmosfæretryk
摘要 Method for continuous plasma treatment or coating of electrically insulated workpieces under atmospheric pressure, especially plates or strip, where the workpiece is located below a high voltage, preferably ac electrode which extends transversely in the movement direction over the width of the workpiece surface, where the electrode and workpiece are offset in the movement direction. A first chamber between the electrode and workpiece is filled with a first atmosphere and a second chamber on the workpiece side oriented away from the eletrode and adjacent to its rear side is filled with a second, different from the first atmosphere. The high voltage and the two atmospheres are selected so that a plasma discharge is provoked in the second atmosphere.
申请公布号 DK1902156(T3) 申请公布日期 2009.08.24
申请号 DK20060762073T 申请日期 2006.06.19
申请人 SOFTAL ELECTRONIC ERIK BLUMENFELD GMBH & CO. KG 发明人 PRINZ, ECKHARD;PALM, PETER;FOERSTER, FRANK
分类号 C23C16/50;C23C16/54 主分类号 C23C16/50
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