X-RAY APPARATUS FOR DETECTING FOREIGN MATTER AND METHOD FOR DETECTING MOVEMENT STOP OF OBJECT TO BE INSPECTED IN THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To detect an actual movement state of an object to be inspected and to precisely control radiating X rays to the object to be inspected. SOLUTION: An X-ray detector 9 outputs an X-ray transmission amount of the object W to be inspected. A movement-detecting part 17 set to a processing means 13 judges on the basis of a change of the X-ray transmission amount that the object W is in a stop state when the X-ray transmission amount is a predetermined value for a set period of time and is continuously almost constant during a preliminarily set period of time. In this case, the processing means 13 controls to stop an X-ray generation part 8 which radiates X rays to the object W. On the other hand, the detecting part 17 judges that the object is moving when the X-ray transmission amount changes during the set period of time.