| 摘要 |
PROBLEM TO BE SOLVED: To maintain a high temperature state of superheated steam generated by heating saturated steam, to stably supply a large quantity of superheated steam and also to enhance the accuracy of a temperature control. SOLUTION: A coil heater 14 is wound around the outer peripheral side of a heating pipe 10, and further a heat insulating material is provided outside the heater. A heat accumulating body 24, constituted of a corrosion-resistant metal wire (or metal piece) 20 and ceramic pieces 22 tangled together at random, is filled inside the heating pipe 10. When the coil heater 14 generates heat, the inside of the heating pipe 10 is heated an a state of the temperature of the heat accumulating body 24 being raised is brought about. Then steam is supplied from a boiler into the heating pipe 10 through an inlet 12 of the pipe. The superheated steam generated by heating by the coil heater 14 passes through the heat accumulating body 24, and therefore the high temperature state thereof is maintained. This steam is supplied into a treatment chamber from an outlet 18 of the heating pipe 10.
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