| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive sensor measuring instrument which is improved in processing speed of signals outputted from a chemical image sensor and reduced in size. SOLUTION: In the chemical image sensor which has a structure in which an insulating layer is formed on the surface of a semiconductor substrate 1 and uses a surface photo voltage method by which the local state of the surface of a semiconductor can be detected by irradiating the semiconductor with AC light 5 from the front or rear surface of the semiconductor, the scanning of the whole surface of the substrate formed in a polygonal or circular shape is performed by not moving an X-Y stage mounted with the sensor, but rotating the substrate. |
