发明名称 2,2,4,4- TETRASILYLPENTASILANE AND ITS COMPOSITIONS, METHODS AND USES
摘要 A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.
申请公布号 EP3041850(A1) 申请公布日期 2016.07.13
申请号 EP20140766329 申请日期 2014.09.03
申请人 DOW CORNING CORPORATION 发明人 ZHOU, XIAOBING
分类号 C07F7/02;C01B33/04;C23C16/24;C23C18/12;H01L21/02 主分类号 C07F7/02
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