Method for cleaning phosphorus from an MBE chamber

摘要

A method for cleaning phosphorus from a MBE vacuum chamber by freezing the panel (22) placed within the vacuum chamber (10) onto which excess phosphorus is deposited. The panel is connected to a source of cold nitrogen (24) which cools the panel. Water is introduced after the panels are cooled so as to form a layer of ice on top of the phosphorus. The panel may then be removed for cleaning with ice covering the phosphorus without danger of ignition of the phosphorus.