| 摘要 |
PURPOSE: An amine concentration controlling apparatus and a formation method of micro-pattern using the same is provided to improve a profile characteristic by performing an amine processing with a quantitative amine using an apparatus capable of artificially controlling an amine density. CONSTITUTION: An amine concentration controlling apparatus comprises a by-pass(60) located between an amine supply part and an amine chamber, a sensor(62) installed on one side of the by-pass(60) for measuring an amine density inserted from the amine supply part, a control panel(64) electrically connected to the sensor(62) for controlling the amine concentration measured from the sensor(62) after the comparison with a programmed amine density, and a valve(66) for controlling an exhausted volume supplied to the amine chamber by the control panel(64).
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