SUBSTRAT POUR MATERIAU A INSOLER

摘要

The invention concerns a substrate (1) having a surface for receiving (4) a layer of material to be exposed by an insolation light, characterised in that the means forming mirror (3) are arranged between said reception surface (4) and the material to be exposed, said means forming mirror (3) operating for the wavelength of the insolation light. Such a substrate can be used for producing microelectronic, micro-technology devices or biochips.