| 摘要 |
PURPOSE: An optical pickup slider is provided to apply a semiconductor batch fabrication process, micro machining, and an HVPE(Hydride Vapor Phase Epitaxy) process, thereby remarkably reducing the size of data by overcoming diffraction limits of an optical system. CONSTITUTION: An upper surface of a flat board and a lower surface of an optical pickup slider are connected in a silicon frame(1) through a sliding surface. The flat board has a circular groove. A hemisphere lens formed on a lower surface of the silicon frame is projected to an upper part through a circular groove of a lower surface of the silicon frame in a high refractive index SIL(Solid Immersion Lens) physical layer(2). The high refractive index SIL physical layer has a tapered type whose thickness is thinner on a lower edge of the upper surface. A laser beam incident on the optical pickup slider is focused through the hemisphere lens, and forms a minute focus on an optical information storage disk(20) separated from the optical pickup slider at a regular gap. |
