发明名称 METHOD FOR EVALUATING SINGLE-CRYSTAL INGOT, AND METHOD FOR CUTTING SINGLE CRYSTAL INGOT USING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for evaluating a single-crystal ingot, capable of accurately inferring a profile of oxygen concentration in the ingot, while leaving the ingot as it is, and dealing with a local change of the concentration, and to provide a method for cutting the ingot using the same. SOLUTION: The method for evaluating the single-crystal ingot comprises the steps of cylindrically grinding the single-crystal ingot 20, then introducing infrared rays 6 from the lateral direction of the ingot 20, while leaving the ingot 20 as it is, and measuring the oxygen concentration in the ingot 20 from its absorption.</p>
申请公布号 JP2002174593(A) 申请公布日期 2002.06.21
申请号 JP20000371469 申请日期 2000.12.06
申请人 MEMC JAPAN LTD 发明人 KURODA KIYOSHI;OGAKI TAKESHI;KOJIMA SHIN;HAGA HIROTSUGU
分类号 G01N21/3563;C30B29/06;G01N21/35;(IPC1-7):G01N21/35 主分类号 G01N21/3563
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