发明名称 BONDER
摘要 PROBLEM TO BE SOLVED: To provide a bonder which stabilizes the bonding quality enough to speed up the bonding operation by making constant the work touch detection time after the top end of a capillary touches a work irrespectively of the search speed. SOLUTION: The bonder has a means for detecting a command value sent from a control means to a drive means and a means for setting a reference value and judges the work tough to be detected when a detection value of the command value detecting means exceeds the reference value of the reference value setting means during lowering of a capillary at a search speed. It varies the sensitivity of the command value detecting means or the reference value of the reference value setting means according to the search speed of the capillary.
申请公布号 JP2002176071(A) 申请公布日期 2002.06.21
申请号 JP20000370711 申请日期 2000.12.05
申请人 KAIJO CORP 发明人 ISHII YUKINOBU
分类号 H01L21/60 主分类号 H01L21/60
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