| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an inspection tool in which the shape of the tip of an inspection electrode formed on a wiring layer is narrower than that of the bottom of the inspection electrode. SOLUTION: A conductor layer 21 on an insulating substrate 11 is subjected to patterning treatment to form a wiring layer 21a, and a negative type resist is coated, dried and patternwise exposed to form a patternwise exposed first negative type photosensitive layer 41a, on which a patternwise exposed second negative type photosensitive layer 51a is also formed. It is then subjected to development treatment to remove the photosensitive layer in an unexposed portion to form a resist pattern 41b and a resist pattern 51b having an aperture 61. Using the wiring layer 21a as a plating electrode, the aperture 61 is subjected to an electrolytic plating to form an inspection electrode 71, and the resist pattern 41b and the resist pattern 51b are subjected to releasing treatment to obtain the inspection tool having the wiring layer 21a and the inspection electrode 71 on the insulating substrate 11.
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