CHARGED PARTICLE BEAM MICROSCOPE, CHARGED PARTICLE BEAM APPLICATION DEVICE, CHARGED PARTICLE BEAM MICROSCOPIC METHOD, CHARGED PARTICLE BEAM INSPECTING METHOD, AND ELECTRON MICROSCOPE

摘要

An electron microscope comprising a short-focus objective is used for capturing a favorable image with high resolution and free of distortion in a wide magnification range from low to high magnification during observation under low acceleration voltage condition. The distortion caused by the objective is canceled by the opposite distortion caused by a correction magnetic field lens for electron beam deflection, thereby forming a scanning electron microscope image with high resolution and no distortion in a wide magnification range from low magnification to high magnification.