Plasma enhanced polymer deposition onto fixtures

摘要

A method for conformally coating a fixture in a vacuum chamber. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, and cryocondensing the glow discharge polymer precursor plasma on the fixture as a condensate and crosslinking the condensate thereon, the crosslinking resulting from radicals created in the glow discharge plasma.