| 摘要 |
PURPOSE: An isolation valve is provided to prevent particles from being moved into a chamber by restricting vortex in suddenly opening a valve around a connecting end of a vacuum line with modifying the structure. CONSTITUTION: An isolation valve shuts off parts(11,12) connected to a vacuum line between a chamber and a vacuum pump by expanding and contracting bellows(13) with the force of a spring in a body(10) and supplying air. A buffering unit(20) is fixed in the isolation valve to turn. The connecting end connected to the vacuum line of the chamber is opened and closed in opening and closing the bellows, and difference of pressure between connecting parts is reduced with the buffering unit. Particles are prevented from being moved into the chamber with relieving drastic difference of pressure between connecting parts in operating the bellows and minimizing vortex.
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