发明名称 Method for forming out-diffusing a dopant from the doped polysilicon into the N-type and P-type doped portion
摘要 In one aspect, the invention includes a semiconductor processing method of diffusing dopant into both n-type and p-type doped regions of a semiconductive substrate. A semiconductive material is provided. The semiconductive material has a first portion and a second portion. The first portion is a p-type doped portion and the second portion is an n-type doped portion. A mask material is formed over the p-type and n-type doped portions. A first opening is formed to extend through the mask material and to the n-type doped portion. A second opening is formed to extend through the mask material and to the p-type doped portion. Conductively doped polysilicon is formed within the first and second openings. Dopant is out-diffused from the conductively-doped polysilicon and into the n-type and p-type doped portions. In another aspect, the invention includes methods of forming CMOS constructions. In yet another aspect, the invention encompasses methods of forming DRAM constructions.
申请公布号 US6406954(B1) 申请公布日期 2002.06.18
申请号 US19990388559 申请日期 1999.09.02
申请人 MICRON TECHNOLOGY, INC. 发明人 BATRA SHUBNEESH;TRAN LUAN C.;LOWREY TYLER A.
分类号 H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L21/8238
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