发明名称 |
FAB yield enhancement system |
摘要 |
A yield enhancement system organizes defect classification and attribute information into a global classification scheme. The global classes are used to identify defect sources and to generate inspection and review plans. The system accumulates defect information in a database and continually refines the information to improve the accuracy of the classification assignments and the identification of the defect sources.
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申请公布号 |
US6408219(B2) |
申请公布日期 |
2002.06.18 |
申请号 |
US19980075254 |
申请日期 |
1998.05.11 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LAMEY, JR. PATRICK H;MAIMON AMOTZ;YARON GAD |
分类号 |
H01L21/02;H01L21/66;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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