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发明名称
摘要
申请公布号
JP3292540(B2)
申请公布日期
2002.06.17
申请号
JP19930069375
申请日期
1993.03.03
申请人
发明人
分类号
H01L21/31;C23C16/46;C23C16/54;C30B25/10;C30B31/12;H01L21/00;H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/31
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代理人
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地址
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