| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure in which uniformity of the temperature on the mounting face is improved by preventing effectively the cold spot at the mounting face of the base body in the heating device that heats the heated object on the base body. SOLUTION: The heating device 15A comprises a base body 5 that has a mounting face 5a for mounting a heated object 2, a main heating element layer 7A for heating the base body 5 and the heating object 2, an auxiliary heating element layer 7B that is laminated with the main heating element layer 7A, an insulating body 6 that is interposed between the main heating element layer 7A and the auxiliary heating element layer 7B. The area of the auxiliary element layer 7B is smaller than the area of the main heating element layer 7A, and while the base body and the heated object are being heated by the exothermicity of the main heating element layer, the escape of the heat from the base body 5 is replenished by the exothermicity of the auxiliary heating element layer 7B.
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