发明名称 METHOD FOR MEASURING AMOUNT OF RESIDUAL SOLVENT IN POLYIMIDE PRECURSOR RESIN MEMBRANE AND METHOD FOR OBTAINING BAKING CONDITION BY THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a method for highly accurately measuring the amount of residual solvents in the baked membrane of a polyimide precursor resin without good reproducibility through the use of gas chromatography analysis regardless of the conditions of devices or the types of the devices and a method for easily obtaining the baking conditions of the polyamide precursor resin in a short time. SOLUTION: The amount of the residual solvents in the polyimide precursor resin membrane is measured by gas chromatography in the measuring method, and the baking conditions are obtained by the same method in the baking condition obtaining method.
申请公布号 JP2002168844(A) 申请公布日期 2002.06.14
申请号 JP20000364141 申请日期 2000.11.30
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 MOTOBE TAKEHARU
分类号 G01N33/44;G01N30/04;G01N30/88;(IPC1-7):G01N30/88 主分类号 G01N33/44
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