| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a particle diffusion type mixedly functional fluid capable of improving the efficiency of existing precision treatment such as various precision machining parts such as a semiconductor silicon wafer, removal of a foreign matter or burr adhered on a surface and in a hole, finish of a side face of a recessed part or finish and cleaning of a side part of the recessed part, and capable of being used for finish machining of a cut face of an optical fiber, and to provide a machining method using the same. SOLUTION: The fluid is obtained by diffusing, as diffusion particles, (a) ferromagnetic particles having diameters of 0.5-50μm and either one or both of (b) grit fine particles such as semiconductor particles or metallic particles having diameters of 0.1-50μm and (c) magnetic fine particles having diameters of 25 nm or less, in a diffusion medium such as kerosine or silicon oil having kinematic viscosity of some 1-10,000 mm2/s and having electric insulation property.</p> |
