| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck excellent in property for separating an object to be attracted without lowering attracting property, and generation of particles is small. SOLUTION: A recess portion 2a is formed on the upper face of a dielectric layer 2 that comprises the electrostatic chuck 1. A fit member 7 comprising a conductive ceramics is joined in the recess portion 2a. The upper face of the dielectric layer 2 and the upper face of a fit member 7 are made to be a placing surface 3 of the material W to be attracted. The flatness of the placing face 3 is made 5 μm or less. |
