发明名称 |
DETECTOR AND DEVICE EVALUATOR |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a means which enables diagnosis to determine where a failure occurs in a device or the observation of how the propagation, coupling and switching of optical signals are done by watching how the propagation of the optical signals is done in the device in real time. SOLUTION: An electrical signal or an optical pulse input is arranged to start the operation of a device and a probe pulse optical input is so arranged as to have a variable time delay with respect thereto. This achieves a detection of a spatial distribution of photoelectrons released from the surface of the device.</p> |
申请公布号 |
JP2002168814(A) |
申请公布日期 |
2002.06.14 |
申请号 |
JP20000367739 |
申请日期 |
2000.11.29 |
申请人 |
HITACHI LTD |
发明人 |
OGAWA SUSUMU;NAGANO HISASHI |
分类号 |
G01N23/227;G01Q30/02;G01Q60/10;G01Q60/12;H01L21/66;H01L27/14;(IPC1-7):G01N23/227;G01N13/12 |
主分类号 |
G01N23/227 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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