发明名称 |
SOCKET FOR ELECTRONIC COMPONENT TEST, AND ELECTRONIC COMPONENT TEST APPARATUS USING THE SOCKET |
摘要 |
An electronic component test apparatus capable of controlling the temperature of a socket for electronic component test such as an IC socket without generating noise in the test signals applied to electronic components such as IC devices and response signals read from the electronic components such as IC devices, wherein a first space (67) in a socket base (6) for electronic component test is allowed to communicate with a socket body internal space (75) in a socket (7) for electronic component test through a gas outlet (65) and a gas inlet (76), and a second space (68) in the socket base (6) for electronic component test is allowed to communicate with the socket body internal space (75) in the socket (7) for electronic component test through a gas inlet (66) and a gas outlet (77). |
申请公布号 |
WO0246781(A1) |
申请公布日期 |
2002.06.13 |
申请号 |
WO2001JP10729 |
申请日期 |
2001.12.07 |
申请人 |
ADVANTEST CORPORATION;ISHIKAWA, TAKAJI;NAKAMURA, HIROTO |
发明人 |
ISHIKAWA, TAKAJI;NAKAMURA, HIROTO |
分类号 |
G01R31/26;G01R1/04;G01R1/06;G01R1/073;G01R31/01;G01R31/28;H01R33/76;(IPC1-7):G01R31/26;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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