发明名称 SOCKET FOR ELECTRONIC COMPONENT TEST, AND ELECTRONIC COMPONENT TEST APPARATUS USING THE SOCKET
摘要 An electronic component test apparatus capable of controlling the temperature of a socket for electronic component test such as an IC socket without generating noise in the test signals applied to electronic components such as IC devices and response signals read from the electronic components such as IC devices, wherein a first space (67) in a socket base (6) for electronic component test is allowed to communicate with a socket body internal space (75) in a socket (7) for electronic component test through a gas outlet (65) and a gas inlet (76), and a second space (68) in the socket base (6) for electronic component test is allowed to communicate with the socket body internal space (75) in the socket (7) for electronic component test through a gas inlet (66) and a gas outlet (77).
申请公布号 WO0246781(A1) 申请公布日期 2002.06.13
申请号 WO2001JP10729 申请日期 2001.12.07
申请人 ADVANTEST CORPORATION;ISHIKAWA, TAKAJI;NAKAMURA, HIROTO 发明人 ISHIKAWA, TAKAJI;NAKAMURA, HIROTO
分类号 G01R31/26;G01R1/04;G01R1/06;G01R1/073;G01R31/01;G01R31/28;H01R33/76;(IPC1-7):G01R31/26;H01L21/66 主分类号 G01R31/26
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