发明名称 MONOLITHIC CORRECTOR PLATE
摘要 A monolithic corrector plate (72) for an interferometer, said corrector plate includes a substrate (73) having an input face (74) for intercepting a first beam emitted by said interferometer, and an output face (76) opposite said input face. An aperture (78) integral with the substrate is configured to conform a first beam intercepted by the input face into a second beam emerging from the output face.
申请公布号 WO0246691(A1) 申请公布日期 2002.06.13
申请号 WO2001US47472 申请日期 2001.12.10
申请人 ZYGO CORPORATION;LEX, ROBERT, M.;CARLSON, ANDREW, ERIC;METZ, MICHAEL 发明人 LEX, ROBERT, M.;CARLSON, ANDREW, ERIC;METZ, MICHAEL
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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