A monolithic corrector plate (72) for an interferometer, said corrector plate includes a substrate (73) having an input face (74) for intercepting a first beam emitted by said interferometer, and an output face (76) opposite said input face. An aperture (78) integral with the substrate is configured to conform a first beam intercepted by the input face into a second beam emerging from the output face.
申请公布号
WO0246691(A1)
申请公布日期
2002.06.13
申请号
WO2001US47472
申请日期
2001.12.10
申请人
ZYGO CORPORATION;LEX, ROBERT, M.;CARLSON, ANDREW, ERIC;METZ, MICHAEL
发明人
LEX, ROBERT, M.;CARLSON, ANDREW, ERIC;METZ, MICHAEL